@phdthesis{Meinel2014, type = {Master Thesis}, author = {Ren{\´e} Meinel}, title = {Mechanische Eigenschaften von superharten Kohlenstoffschichten (ta-C)}, url = {https://nbn-resolving.org/urn:nbn:de:bsz:mit1-opus-42164}, year = {2014}, abstract = {nicht vorhanden}, language = {de} }