@phdthesis{Schille2015, type = {Master Thesis}, author = {Marco Schille}, title = {Technologieentwicklung f{\"u}r die Polyimidbeschichtung von Piezo-Stacks}, url = {https://nbn-resolving.org/urn:nbn:de:bsz:mit1-opus-49386}, year = {2015}, abstract = {nicht vorhanden}, language = {de} }