TY  - CHAP
U1  - Konferenzveröffentlichung
A1  - Mann, Thomas
A1  - Schlüter, Holger
A1  - Merkt, Florian
A1  - Lange, Felix
A1  - Skilar, Alex
A1  - Kaplan, Natan
A1  - Eifel, Stephan
A1  - Chemerenko, Olga
A1  - Gretzki, Patrick
T1  - Beam shaping and splitting with diffractive optics for high performance laser scanning systems
T2  - 12. Mittweidaer Lasertagung
N2  - Diffractive optical elements (DOEs) enable novel high performance and process-tailored scanning strategies for galvanometer-based scan heads. Here we present several such concepts integrating DOEs with laser scanners and the respective application use cases. Beam shaping DOEs providing a homogeneous fluence over a custom defined profile, such as a rectangular Top-Hat, enable increased process quality in Laser-Induced Forward Transfer (LIFT) compared to the Gaussian beam of the laser source. We show that aberrations which occur over the necessary large wafer-sized image field can be eliminated through the use of a synchronous XY-stage motion. Another application that benefits from the use of DOEs is laser drilling. Drilling in display and electronics manufacturing demands high throughput that can only be achieved through the use of beam splitting DOEs for parallel processing. To this end, the joint MULTISCAN project is developing a variable multi-beam tool capable of scanning and switching each individual beamlet for increased control.
KW  - Beam shaping
KW  - beam splitting
KW  - diffractive optics
KW  - laser scanning
KW  - MicroLED
KW  - laser drilling
KW  - micromachining
Y1  - 2021
UN  - https://nbn-resolving.org/urn:nbn:de:bsz:mit1-opus4-128583
SN  - 1437-7624
SS  - 1437-7624
U6  - https://doi.org/10.48446/opus-12858
DO  - https://doi.org/10.48446/opus-12858
IS  - 003
SP  - 056
EP  - 060
S1  - 5
PB  - Hochschule Mittweida
CY  - Mittweida
ER  -