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Beam shaping and splitting with diffractive optics for high performance laser scanning systems

  • Diffractive optical elements (DOEs) enable novel high performance and process-tailored scanning strategies for galvanometer-based scan heads. Here we present several such concepts integrating DOEs with laser scanners and the respective application use cases. Beam shaping DOEs providing a homogeneous fluence over a custom defined profile, such as a rectangular Top-Hat, enable increased process quality in Laser-Induced Forward Transfer (LIFT) compared to the Gaussian beam of the laser source. We show that aberrations which occur over the necessary large wafer-sized image field can be eliminated through the use of a synchronous XY-stage motion. Another application that benefits from the use of DOEs is laser drilling. Drilling in display and electronics manufacturing demands high throughput that can only be achieved through the use of beam splitting DOEs for parallel processing. To this end, the joint MULTISCAN project is developing a variable multi-beam tool capable of scanning and switching each individual beamlet for increased control.

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Metadaten
Author:Thomas Mann, Holger Schlüter, Florian Merkt, Felix Lange, Alex Skilar, Natan Kaplan, Stephan Eifel, Olga Chemerenko, Patrick Gretzki
URN:urn:nbn:de:bsz:mit1-opus4-128583
DOI:https://doi.org/10.48446/opus-12858
ISSN:1437-7624
Parent Title (German):12. Mittweidaer Lasertagung
Publisher:Hochschule Mittweida
Place of publication:Mittweida
Document Type:Conference Proceeding
Language:English
Year of Completion:2021
Publishing Institution:Hochschule Mittweida
Contributing Corporation:SCANLAB GmbH Puchheim
Release Date:2021/12/09
Tag:Beam shaping; MicroLED; beam splitting; diffractive optics; laser drilling; laser scanning; micromachining
Issue:003
Page Number:5
First Page:056
Last Page:060
Open Access:Frei zugänglich
Licence (German):License LogoUrheberrechtlich geschützt