Florian Rößler, Mathias Müller, Robby Ebert, André Streek

• Increasing speed in laser processing is driven by the development of high-power lasers into ranges of more than 1 kW. Additionally, a proper distribution of these laser power is required to achieve high quality processing results. In the case of high pulse repletion rates, a proper distribution of the pulses can be obtained from ultrafast beam deflection in the range of several 100 m/s. A two-dimensional polygon mirror scanner has been used to distribute a nanosecond pulsed laser with up to 1 kW average power at a wavelength of 1064 nm for multi pass laser engraving. The pulse duration of this laser can be varied between 30 ns and 240 ns and the pulse repetition rate is set between 1 and 4 MHz. The depth information is included in greyscale bitmaps, which were used to modulate the laser during the scanning accordingly to the lateral position and the depth. The process allows high processing rates and thus high throughput.